Development of ion-beam technique for manufacturing silicon...

Nanotechnologies in Russia 2012 / 02 Vol. 7; Iss. 1-2

Development of ion-beam technique for manufacturing silicon nanowires

B. A. Gurovich, K. E. Prikhod’ko, A. N. Taldenkov, A. Yu. Yakubovskii, K. I. Maslakov, D. A. Komarov, L. V. Kutuzov, G. E. Fedorov
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Volume:
7
Language:
english
Pages:
5
DOI:
10.1134/s1995078012010090
Date:
February, 2012
File:
PDF, 314 KB
english, 2012
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