[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Multi-position large tuning-range digitally tuneable capacitors embedded in 3D micromachined transmission lines
Shah, U., Sterner, M., Stemme, G., Oberhammer, J.Year:
2011
Language:
english
Pages:
4
DOI:
10.1109/memsys.2011.5734387
File:
PDF, 1.05 MB
english, 2011