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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Capacitive-piezoelectric AlN resonators with Q
Hung, Li-Wen, Nguyen, Clark T.-C.Year:
2011
Language:
english
Pages:
4
DOI:
10.1109/memsys.2011.5734389
File:
PDF, 1.06 MB
english, 2011