[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Acoustic whispering gallery mode resonator with Q > 109,000 at 515MHz
Rocheleau, Tristan O., Naing, Thura Lin, Ren, Zeying, Nguyen, Clark T.-C.Year:
2012
Language:
english
Pages:
4
DOI:
10.1109/memsys.2012.6170276
File:
PDF, 1.77 MB
english, 2012