Metal Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem
Graf, Markus, Barrettino, Diego, Taschini, Stefano, Hagleitner, Christoph, Hierlemann, Andreas, Baltes, HenryVolume:
76
Year:
2004
Language:
english
Pages:
9
DOI:
10.1021/ac035432h
File:
PDF, 641 KB
english, 2004