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[IEEE 2011 IEEE 38th International Conference on Plasma Sciences (ICOPS) - Chicago, IL, USA (2011.06.26-2011.06.30)] 2011 Abstracts IEEE International Conference on Plasma Science - Simulation of microwave plasma discharge in 915 MHZ CVD reactor for single crystal diamond deposition
Hemawan, K. W., Yan, C. S., Liang, Q., Lai, J., Krasnicki, S., Meng, Y., Mao, H. K., Hemley, R. J.Year:
2011
Language:
english
Pages:
1
DOI:
10.1109/plasma.2011.5993165
File:
PDF, 49 KB
english, 2011