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Subnanometer Scaling of HfO[sub 2]/Metal Electrode Gate Stacks
Peterson, Jeff J., Young, Chadwin D., Barnett, Joel, Gopalan, Sundar, Gutt, Jim, Lee, Choong-Ho, Li, Hong-Jyh, Hou, Tuo-Hung, Kim, Yudong, Lim, ChanVolume:
7
Year:
2004
Language:
english
Pages:
1
DOI:
10.1149/1.1760712
File:
PDF, 691 KB
english, 2004