[IEEE 2004 14th International Crimean Conference "Microwave and Telecommunication Technology" - Sevastopoll, Crimea, Ukraine (2004.9.13-2004.9.17)] 2004 14th International Crimean Conference "Microwave and Telecommunication Technology" (IEEE Cat. No.04EX843) - Formation of high-conducting nanostructures in low-conducting diamond-like carbon films using SPM-lithograph

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