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Characterization of a single-crystal silicon micromirror array for maskless UV lithography in biochip applications
Jang, Yun-Ho, Lee, Kook-Nyung, Kim, Yong-KweonVolume:
16
Year:
2006
Language:
english
Pages:
9
DOI:
10.1088/0960-1317/16/11/016
File:
PDF, 2.11 MB
english, 2006