Quantitative electron microprobe analysis of aluminum,...

Journal of Applied Physics 2002 Vol. 92; Iss. 6

Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates

Yasuda, Masaaki, Yamauchi, Shunji, Kawata, Hiroaki, Murata, Kenji
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Volume:
92
Year:
2002
Language:
english
DOI:
10.1063/1.1502923
File:
PDF, 359 KB
english, 2002
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