[IEEE 2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011) - Erlagol, Altai, Russia (2011.06.30-2011.07.4)] 2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings - Investigation of SiOx layer annealing process using Monte Carlo simulation
Mikhantiev, Eugene A., Karpov, Alexander N., Usenkov, Stanislav V., Shwartz, Natalia L.Year:
2011
Language:
english
Pages:
5
DOI:
10.1109/edm.2011.6006897
File:
PDF, 820 KB
english, 2011