[IEEE 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2009.07.1-2009.07.6)] 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices - Monte carlo simulation of thin silicon dioxide layer evaporation
Usenkov, Stanislav V., Mzhelskiy, Ivan V., Shwartz, Nataliya L.Year:
2009
Language:
english
Pages:
4
DOI:
10.1109/edm.2009.5173931
File:
PDF, 927 KB
english, 2009