Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering
Abadias, G., Tse, Y. Y., Guerin, Ph., Pelosin, V.Volume:
99
Year:
2006
Language:
english
DOI:
10.1063/1.2197287
File:
PDF, 1.22 MB
english, 2006