![](/img/cover-not-exists.png)
Detached Glow Above a Titanium Hollow Cathode Sputter Source
Niedrist, Raimund, Schrittwieser, RomanVolume:
39
Year:
2011
Language:
english
Pages:
2
DOI:
10.1109/tps.2011.2162855
File:
PDF, 198 KB
english, 2011