Detached Glow Above a Titanium Hollow Cathode Sputter...

Detached Glow Above a Titanium Hollow Cathode Sputter Source

Niedrist, Raimund, Schrittwieser, Roman
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Volume:
39
Year:
2011
Language:
english
Pages:
2
DOI:
10.1109/tps.2011.2162855
File:
PDF, 198 KB
english, 2011
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