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Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
Lallement, L, Rhallabi, A, Cardinaud, C, Peignon-Fernandez, M C, Alves, L LVolume:
18
Year:
2009
Language:
english
DOI:
10.1088/0963-0252/18/2/025001
File:
PDF, 194 KB
english, 2009