[IEEE 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2009.07.1-2009.07.6)] 2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices - The optimal conditions of obtaining AlN-layers on sapphire with MBE method

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