Two-dimensional modelling of - radio-frequency discharges...

Plasma Sources Science and Technology 1998 Vol. 7; Iss. 3

Two-dimensional modelling of - radio-frequency discharges for a-Si:H deposition

Leroy, Olivier, Gousset, Gérard, Alves, Luís Lemos, Perrin, Jérôme, Jolly, Jacques
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Volume:
7
Year:
1998
Language:
english
Pages:
11
DOI:
10.1088/0963-0252/7/3/013
File:
PDF, 479 KB
english, 1998
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