[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Array Test Structure for Ultra-Thin Gate Oxide Degradation Issues
Hafkemeyer, Kristian M., Domdey, Andreas, Schroeder, Dietmar, Krautschneider, Wolfgang H.Year:
2009
Language:
english
Pages:
6
DOI:
10.1109/icmts.2009.4814616
File:
PDF, 961 KB
english, 2009