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Thermally induced formation of SiC nanoparticles from Si/C/Si multilayers deposited by ultra-high-vacuum ion beam sputtering
Chung, Chen-Kuei, Wu, Bo-HsiungVolume:
17
Year:
2006
Language:
english
Pages:
5
DOI:
10.1088/0957-4484/17/13/008
File:
PDF, 763 KB
english, 2006