Computer modelling of magnetron discharges
Bogaerts, Annemie, Bultinck, Evi, Kolev, Ivan, Schwaederlé, Laurent, Van Aeken, Koen, Buyle, Guy, Depla, DiederikVolume:
42
Year:
2009
Language:
english
DOI:
10.1088/0022-3727/42/19/194018
File:
PDF, 1.36 MB
english, 2009