New Phenomena of Charge Damage in Plasma Etching: Heavy...

New Phenomena of Charge Damage in Plasma Etching: Heavy Damage Only through Dense-Line Antenna

Hashimoto, Koichi
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Volume:
32
Year:
1993
Pages:
5
DOI:
10.1143/jjap.32.6109
File:
PDF, 920 KB
1993
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