Dielectric properties of CVD grown SiON thin films on Si...

Semiconductor Science and Technology 2004 Vol. 19; Iss. 1

Dielectric properties of CVD grown SiON thin films on Si for MOS microelectronic devices

Konofaos, N, Evangelou, E K, Aslanoglou, X, Kokkoris, M, Vlastou, R
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Volume:
19
Year:
2004
Language:
english
Pages:
4
DOI:
10.1088/0268-1242/19/1/008
File:
PDF, 127 KB
english, 2004
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