Thermal conductivity of aluminium nitride thin films...

Journal of Physics D Applied Physics 2012 Vol. 45; Iss. 1

Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

Duquenne, C, Besland, M-P, Tessier, P Y, Gautron, E, Scudeller, Y, Averty, D
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Volume:
45
Year:
2012
Language:
english
DOI:
10.1088/0022-3727/45/1/015301
File:
PDF, 1.09 MB
english, 2012
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