A low-voltage lateral MEMS switch with high RF performance

Journal of Microelectromechanical Systems 2004 Vol. 13; Iss. 6

A low-voltage lateral MEMS switch with high RF performance

Ye Wang, Zhihong Li, McCormick, D.T., Tien, N.C.
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Volume:
13
Year:
2004
Language:
english
Pages:
10
DOI:
10.1109/jmems.2004.838395
File:
PDF, 2.02 MB
english, 2004
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