PZT films for micro-pumps

Integrated Ferroelectrics 1995 Vol. 8; Iss. 1

PZT films for micro-pumps

Brooks, K., Damjanovic, D., Kholkin, A., Reaney, I., Setter, N., Luginbuhl, P., Racine, G.-A., de Rooij, N. F., Saaman, A.
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Volume:
8
Year:
1995
Language:
english
Pages:
11
DOI:
10.1080/10584589508012296
File:
PDF, 808 KB
english, 1995
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