[ SPIE LASE - San Francisco, California (Saturday 21...

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[ SPIE LASE - San Francisco, California (Saturday 21 January 2012)] - Stability-enhanced, high-average power green lasers for precision semiconductor processing

Hay, Nick, Baker, Ian, Guo, Yili, Bashford, Stuart, Kwon, Young, Clarkson, W. Andrew, Shori, Ramesh K.
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Language:
english
DOI:
10.1117/12.909400
File:
PDF, 3.97 MB
english
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