Submicron structuring of YBa2Cu3O7 thin films with electron...

Journal of Applied Physics 1990 Vol. 68; Iss. 7

Submicron structuring of YBa2Cu3O7 thin films with electron beam lithography

Albrecht, W., Langheinrich, W., Kurz, H., Poppe, U., Soltner, H., Schubert, J.
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Volume:
68
Year:
1990
Language:
english
DOI:
10.1063/1.346303
File:
PDF, 546 KB
english, 1990
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