Chemical Processing of Materials on Silicon: More...

Annual Review of Chemical and Biomolecular Engineering 2012 / 07 Vol. 3; Iss. 1

Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers

Marchack, Nathan, Chang, Jane P.
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Volume:
3
Language:
english
Pages:
28
Journal:
Annual Review of Chemical and Biomolecular Engineering
DOI:
10.1146/annurev-chembioeng-062011-080958
Date:
July, 2012
File:
PDF, 1.87 MB
english, 2012
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