Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
George, Steven M., Yoon, Byunghoon, Dameron, Arrelaine A.Volume:
42
Year:
2009
Language:
english
Pages:
11
DOI:
10.1021/ar800105q
File:
PDF, 538 KB
english, 2009