Swift heavy ion induced growth of nanocrystalline silicon...

Swift heavy ion induced growth of nanocrystalline silicon in silicon oxide

Chaudhari, Prajakta S., Bhave, Tejashree M., Kanjilal, D., Bhoraskar, S. V.
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Volume:
93
Year:
2003
Language:
english
DOI:
10.1063/1.1542913
File:
PDF, 443 KB
english, 2003
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