A non-stationary model for high power impulse magnetron...

A non-stationary model for high power impulse magnetron sputtering discharges

Kozak, Tomas, Dagmar Pajdarova, Andrea
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Volume:
110
Year:
2011
Language:
english
DOI:
10.1063/1.3656446
File:
PDF, 2.81 MB
english, 2011
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