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Gas temperature, electron density and electron temperature measurement in a microwave excited microplasma
Zhu, Xi-Ming, Chen, Wen-Cong, Pu, Yi-KangVolume:
41
Year:
2008
Language:
english
DOI:
10.1088/0022-3727/41/10/105212
File:
PDF, 474 KB
english, 2008