New Electron Beam Proximity Effects Correction Approach for 45 and 32 nm Nodes
Manakli, S., Docherty, K., Pain, L., Todeschini, J., Jurdit, M., Icard, B., Chomat, M., Minghetti, B.Volume:
45
Year:
2006
Language:
english
Pages:
6
DOI:
10.1143/jjap.45.6462
File:
PDF, 173 KB
english, 2006