Structural characterization of a lamellar W/Si multilayer grating
Jergel, M., Mikulı k, P., Majkova, E., Luby, S., Senderak, R., Pincı k, E., Brunel, M., Hudek, P., Kostic, I., Konecnı kova, A.Volume:
85
Year:
1999
Language:
english
DOI:
10.1063/1.369346
File:
PDF, 396 KB
english, 1999