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Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone
Jandhyala, Srikar, Mordi, Greg, Lee, Bongki, Lee, Geunsik, Floresca, Carlo, Cha, Pil-Ryung, Ahn, Jinho, Wallace, Robert M., Chabal, Yves J., Kim, Moon J.Volume:
6
Year:
2012
Language:
english
Pages:
9
DOI:
10.1021/nn300167t
File:
PDF, 529 KB
english, 2012