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[IEEE 2008 IEEE International Vacuum Electronics Conference (IVEC) - Monterey, CA, USA (2008.04.22-2008.04.24)] 2008 IEEE International Vacuum Electronics Conference - High voltage MEMS platform for fully integrated, on-chip, vacuum electronic devices
Natarajan, Srividya, Parker, Charles B., Glass, Jeffrey T., Bower, Christopher A., Gilchrist, Kristin H., Piascik, Jeffrey R., Stoner, Brian R.Year:
2008
Language:
english
Pages:
2
DOI:
10.1109/ivelec.2008.4556325
File:
PDF, 421 KB
english, 2008