The role of metastable atoms in argon-diluted silane...

Journal of Physics D Applied Physics 1994 Vol. 27; Iss. 7

The role of metastable atoms in argon-diluted silane radiofrequency plasmas

Sansonnens, L, Howling, A A, Hollenstein, C, Dorier, J -L, Kroll, U
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Volume:
27
Year:
1994
Language:
english
Pages:
6
DOI:
10.1088/0022-3727/27/7/011
File:
PDF, 497 KB
english, 1994
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