SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Grazing Incidence and Multilayer X-Ray Optical Systems - X-ray reflectivity and mechanical stress in W/Si multilayers deposited on thin substrates of glass, epoxy-replicated aluminum foil, and Si wafer
Platonov, Yuriy Y., Broadway, David M., DeGroot, Brian, Mao, Peter H., Harrison, Fiona A., Gutman, George, Rodriguez, James, Hoover, Richard B., Walker II, Arthur B. C.Volume:
3113
Year:
1997
Language:
english
Pages:
7
DOI:
10.1117/12.278878
File:
PDF, 409 KB
english, 1997