SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - Feedback interferometry with semiconductor laser for high-resolution displacement sensing
Donati, Silvano, Merlo, Sabina, Micolano, Francesco, Parriaux, Olivier M.Volume:
2783
Year:
1996
Language:
english
Pages:
8
DOI:
10.1117/12.248490
File:
PDF, 410 KB
english, 1996