LAyer Selection by ERase (LASER) With an...

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 7

LAyer Selection by ERase (LASER) With an Etch-Through-Spacer Technique in a Bit-Line Stacked 3-D nand Flash Memory Array

Jang-Gn Yun, Se Hwan Park, Byung-Gook Park
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Volume:
58
Year:
2011
Language:
english
Pages:
6
DOI:
10.1109/ted.2011.2142417
File:
PDF, 1.05 MB
english, 2011
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