![](/img/cover-not-exists.png)
[IEEE International Electron Devices Meeting. Technical Digest. IEDM - San Francisco, CA, USA (10-13 Dec. 2000)] International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) - Boron diffusion and activation in the presence of other species
Hong-Jyh Li,, Kohli, P., Ganguly, S., Kirichenko, T.A., Zeitzoff, P., Torres, K., Banerjee, S.Year:
2000
Language:
english
Pages:
4
DOI:
10.1109/iedm.2000.904368
File:
PDF, 418 KB
english, 2000