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Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography
Kozhummal, Rajeevan, Berenschot, Erwin, Jansen, Henri, Tas, Niels, Zacharias, Margit, Elwenspoek, MikoVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/8/085032
Date:
August, 2012
File:
PDF, 1.52 MB
english, 2012