Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures
Schulze, J, Heil, B G, Luggenhölscher, D, Mussenbrock, T, Brinkmann, R P, Czarnetzki, UVolume:
41
Year:
2008
Language:
english
DOI:
10.1088/0022-3727/41/4/042003
File:
PDF, 328 KB
english, 2008