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Correlation of local structure and electrical activation in arsenic ultrashallow junctions in silicon
Giubertoni, Damiano, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, Sahiner, Mehmet Alper, Kelty, Stephen P., Doherty, Roisin, Foad, Majeed A., Kah, Max, Kirkby, Karen J., Woicik, Joseph C.Volume:
104
Year:
2008
Language:
english
DOI:
10.1063/1.3026706
File:
PDF, 668 KB
english, 2008