Correlation of local structure and electrical activation in...

Journal of Applied Physics 2008 Vol. 104; Iss. 10

Correlation of local structure and electrical activation in arsenic ultrashallow junctions in silicon

Giubertoni, Damiano, Pepponi, Giancarlo, Gennaro, Salvatore, Bersani, Massimo, Sahiner, Mehmet Alper, Kelty, Stephen P., Doherty, Roisin, Foad, Majeed A., Kah, Max, Kirkby, Karen J., Woicik, Joseph C.
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Volume:
104
Year:
2008
Language:
english
DOI:
10.1063/1.3026706
File:
PDF, 668 KB
english, 2008
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