Ion mass spectrometry investigations of the discharge...

Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2

Schmidt, S., Czigány, Zs., Greczynski, G., Jensen, J., Hultman, L.
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Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4733692
File:
PDF, 2.57 MB
english, 2012
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