Plasma-assisted InP-to-Si low temperature wafer bonding

IEEE Journal of Selected Topics in Quantum Electronics 2002 Vol. 8; Iss. 1

Plasma-assisted InP-to-Si low temperature wafer bonding

Pasquariello, D., Hjort, K.
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Volume:
8
Year:
2002
Language:
english
Pages:
14
DOI:
10.1109/2944.991407
File:
PDF, 443 KB
english, 2002
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