[IEEE 2010 International Conference on Measuring Technology and Mechatronics Automation (ICMTMA 2010) - Changsha City, China (2010.03.13-2010.03.14)] 2010 International Conference on Measuring Technology and Mechatronics Automation - Micro Inductively Coupled Plasma Excitation Source Based on the Three-Dimensional Spiral-Shaped Coil

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