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A Microfabricated Inductively Coupled Plasma Excitation Source
Yong-Qing, Wang, Yong-Ni, Pu, Rong-Xia, Sun, Yu-Jun, Tang, Wen-Jun, Chen, Jian-Zhong, Lou, Wen, MaVolume:
25
Year:
2008
Language:
english
Pages:
3
DOI:
10.1088/0256-307x/25/1/055
File:
PDF, 2.34 MB
english, 2008