Diagnostics of Argon Inductively Coupled Plasma and Dielectric Barrier Discharge Plasma by Optical Emission Spectroscopy
Jia-liang, Zhang, Shi-ji, Yu, Teng-cai, Ma, Xin-lu, DengVolume:
3
Year:
2001
Language:
english
Pages:
8
DOI:
10.1088/1009-0630/3/4/008
File:
PDF, 547 KB
english, 2001