Hydrogen role on the properties of amorphous silicon...

Journal of Applied Physics 1999 Vol. 86; Iss. 4

Hydrogen role on the properties of amorphous silicon nitride

de Brito Mota, F., Justo, J. F., Fazzio, A.
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Volume:
86
Year:
1999
Language:
english
DOI:
10.1063/1.370977
File:
PDF, 296 KB
english, 1999
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